Spectrometer including metasurface

ABSTRACT

A spectrometer includes a substrate; a slit which is provided on the substrate and through which light is incident onto the substrate; a metasurface including nanostructures that is configured to reflect and focus the light incident thereon through the slit, at different angles based on respective wavelengths; and a sensor which is provided on one side of the substrate that is opposite to another side of the substrate at which the metasurface is disposed, and configured to receive the light from the metasurface.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation of U.S. application Ser. No. 15/221,184 filedJul. 27, 2016, which claims the benefit of U.S. Provisional ApplicationNo. 62/198,337, filed Jul. 29, 2015, in the U.S. Patent and Trademarkoffice, and claims priority from Korean Patent Application No.10-2016-0045802, filed Apr. 14, 2016, in the Korean IntellectualProperty Office, the disclosures of which are incorporated herein byreference in their entireties.

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH

This invention was made with government support under Grant No.W911NF-14-1-0345 awarded by the ARO-US Army. The government has certainrights in the invention.

BACKGROUND 1. Field

Apparatuses consistent with exemplary embodiments relate to aspectrometer including a metasurface.

2. Description of the Related Art

Optical elements for changing transmittance, reflection, polarization,phase, intensity, and paths of incident light are used in variousoptical devices. The optical elements include a heavy lens, a mirror,etc., and, thus, it is difficult to miniaturize the optical devicesincluding the optical elements. A spectrometer includes an opticalelement, and this may make the spectrometer big and heavy. Variousresearch into miniaturizing a structure of the spectrometer andimproving the performance of the spectrometer has been conducted.

SUMMARY

Exemplary embodiments address at least the above problems and/ordisadvantages and other disadvantages not described above. Also, theexemplary embodiments are not required to overcome the disadvantagesdescribed above, and may not overcome any of the problems describedabove.

One or more exemplary embodiments may provide a spectrometer including ametasurface.

According to an aspect of an exemplary embodiment, a spectrometerincludes: a transparent substrate including a first surface and a secondsurface facing each other; a slit provided on the first surface andthrough which light to be examined is incident onto the transparentsubstrate; a spectrum optical system provided on the first surface orthe second surface and including at least one metasurface including aplurality of nanostructures that are two-dimensionally arranged and asurrounding structure surrounding the plurality of nanostructures,wherein the at least one metasurface includes a focusing metasurfacereflecting and focusing the light incident through the slit, atdifferent angles based on respective wavelengths; and a sensor providedon the first surface or the second surface of the transparent substrateand receiving the light from the spectrum optical system.

The spectrometer may further include a block layer provided on thetransparent substrate and blocking the light from being incident ontoareas other than the slit.

The spectrum optical system may further include a collimatingmetasurface including a plurality of nanostructures that aretwo-dimensionally arranged to have a collimating function.

The collimating metasurface may be located on an optical path betweenthe slit and the focusing metasurface.

The spectrum optical system may further include a grating metasurfaceincluding a plurality of nanostructures that are two-dimensionallyarranged to have a chromatic dispersion function.

The grating metasurface may be located on an optical path between thecollimating metasurface and the focusing metasurface.

The grating metasurface and the sensor may be provided on the firstsurface, and the collimating metasurface and the focusing metasurfacemay be provided on the second surface.

The grating metasurface, the collimating metasurface, the focusingmetasurface, and the sensor may be two-dimensionally arranged, on a planview seen from a direction perpendicular to the first surface.

The transparent substrate may include side surfaces connecting the firstsurface and the second surface, and on the plan view seen from thedirection perpendicular to the first surface, the collimatingmetasurface and the grating metasurface may be arranged adjacent to oneside surface of the side surfaces, and the focusing metasurface and thesensor may be arranged adjacent to the other side surface facing thesurface.

In the at least one metasurface, a height of each of the plurality ofnanostructures, or a longest diameter of a section of the plurality ofnanostructures may be less than a wavelength of the light.

The spectrum optical system may include a grating metasurface, thegrating metasurface may include a pattern including a plurality ofnanostructures arranged apart from each other in a second direction, andthe pattern may be cyclically repeated in a first direction that isperpendicular to the second direction.

The focusing metasurface may have one or more ring-shaped areas in whichdiameters of the plurality of nanostructures increase or decrease as theplurality of nanostructures distance from a point on the focusingmetasurface.

The spectrum optical system may further include a split metasurfaceconfigured to split the light into first polarization light and secondpolarization light based on polarization and reflect the split first andsecond polarization lights based on wavelengths, and the sensor mayinclude a first sensor configured to receive the split firstpolarization light and a second sensor configured to receive the splitsecond polarization light.

The focusing metasurface may include a first focusing metasurfaceconfigured to focus the first polarization light to the first sensor anda second focusing metasurface configured to focus the secondpolarization light to the second sensor.

The split metasurface may include a pattern including a plurality ofnanostructures arranged such that each diameter of elements thereof in afirst direction increases and then decreases, and the pattern may becyclically repeated in the first direction and a second direction thatis perpendicular to the first direction.

When L is a total length of an optical path from the slit to the sensorand D is a thickness of the transparent substrate, L and D may satisfythe following inequality: L/D>3.

The surrounding structure may include at least one among silicon dioxide(SiO₂), glass, and a polymer.

The transparent substrate may include at least one among SiO₂, glass,and a polymer.

The plurality of nanostructures may include at least one amongcrystalline silicon (c-Si), amorphous silicon (a-Si), poly-silicon(p-Si), gallium phosphide (GaP), gallium arsenide (GaAs), siliconcarbide (SiC), titanium dioxide (TiO₂), silicon nitride (SiN), andgallium nitride (GaN).

BRIEF DESCRIPTION OF THE DRAWINGS

The above and/or other aspects will become more apparent by describingcertain exemplary embodiments with reference to the accompanyingdrawings, in which:

FIG. 1 is a schematic cross-sectional view of a spectrometer accordingto an exemplary embodiment;

FIG. 2 is a view of a focusing metasurface according to an exemplaryembodiment;

FIG. 3 is a view of a focusing metasurface according to an exemplaryembodiment;

FIG. 4 is a schematic cross-sectional view of a spectrometer accordingto an exemplary embodiment;

FIG. 5 shows schematic perspective views of shapes of a nanostructure;

FIG. 6 is a view of a grating metasurface according to an exemplaryembodiment;

FIG. 7 is a graph of a grating efficiency of the grating metasurfaceaccording to an exemplary embodiment;

FIG. 8 is a view of a grating metasurface according to an exemplaryembodiment;

FIG. 9 is a schematic cross-sectional view of a spectrometer accordingto an exemplary embodiment;

FIG. 10 is a schematic cross-sectional view of a spectrometer accordingto an exemplary embodiment;

FIG. 11 is a schematic plan view of the spectrometer of FIG. 10;

FIG. 12 is a schematic perspective view of a spectrometer according toan exemplary embodiment;

FIG. 13 is a view of a split metasurface according to an exemplaryembodiment; and

FIG. 14 is a view of a nanostructure pattern of the split metasurface ofFIG. 13.

DETAILED DESCRIPTION

Certain exemplary embodiments are described in greater detail below withreference to the accompanying drawings.

In the following description, like drawing reference numerals are usedfor like elements, even in different drawings. The matters defined inthe description, such as detailed construction and elements, areprovided to assist in a comprehensive understanding of the exemplaryembodiments. However, it is apparent that the exemplary embodiments canbe practiced without those specifically defined matters. Also,well-known functions or constructions are not described in detail sincethey would obscure the description with unnecessary detail.

FIG. 1 is a schematic cross-sectional view of a spectrometer 100according to an exemplary embodiment.

Referring to FIG. 1, the spectrometer 100 according to the presentexemplary embodiment may include a spectrum optical system 110 ametasurface, for example, a focusing metasurface 111, a sensor 120, atransparent substrate 130, and a slit 140.

The spectrometer 100 according to the present exemplary embodiment mayreplace the related art optical element having a relatively large sizewith the spectrum optical system 110 having a shape of a flat plate andincluding a metasurface. The related art optical element may include,for example, a collimator, a prism or grating pattern, a concave mirror,etc. The spectrum optical system 110 may be lighter and smaller than therelated art optical element.

The transparent substrate 130 may include a material that is transparentwith respect to incident light and has a low refractive index. Forexample, the incident light may be light, such as visible rays, infraredrays, and ultraviolet rays, and the transparent substrate 130 may havetransparency with respect to the light. The transparency may denotehardly any or almost no optical loss when light proceeds onto thetransparent substrate 130. For example, the transparent substrate 130may include a glass-based material, or a polymer. The polymer mayinclude PMMA, PDMS, SU8, or the like. The transparent substrate 130including the polymer may be flexible.

The transparent substrate 130 may have a shape of a flat plate. The flatplate may include a first surface 142 and a second surface 144 facingthe first surface 142, wherein the first surface 142 and the secondsurface 144 have a relatively greater width than each of side surfaces146 connecting the first surface and the second surface. The flat platemay include a plate having a curved shape, in addition to the platehaving the flat shape.

Referring to FIG. 1, the spectrum optical system 110 may include atleast one metasurface, for example, a focusing metasurface 111,including a plurality of nanostructures ns that are two-dimensionallyarranged and a surrounding structure sr surrounding the plurality ofnanostructures. The nanostructures ns may have various arrangements inthe metasurface. According to the various arrangements of thenanostructures ns, the metasurface may function as various opticalelements. For example, the spectrum optical system 110 may include themetasurface functioning as a collimator, a grating element, a focusingmirror, etc.

The nanostructures ns may have a higher refractive index than thesurrounding structure sr. The nanostructures ns may have a higherrefractive index than the transparent substrate 130. The nanostructuresns and the surrounding structure sr may be provided on a substrate SUB,and the nanostructures ns may have a greater refractive index than thesubstrate SUB. Each metasurface may have a shape in which thenanostructures ns and the surrounding structure sr are arranged on thesubstrate SUB. However, the substrate SUB may be removed after ametasurface is formed. Referring to FIG. 1, it is illustrated that themetasurface includes the substrate SUB. However, an exemplary embodimentis not limited thereto.

The nanostructures ns may function like a resonator due to ahigh-contrast refractivity difference with respect to the surroundingstructure sr. For example, each of the nanostructures ns may temporarilycapture incident light. As the refractivity difference between thenanostructures ns and the surrounding structure sr increases, thenanostructures ns may capture a greater amount of light in each of thenanostructures ns for a longer time. A wavelength range of the lightcaptured by the nanostructures ns is called a resonant wavelength range,and each of nanostructures ns may have a different resonant wavelengthrange. For example, the resonant wavelength range may be different foreach of the nanostructures ns, based on a shape, a size, and arefractive index of the nanostructure ns. Hereinafter, a centralwavelength of the resonant wavelength range will be referred to as aresonant wavelength.

The nanostructures ns may emit the captured light. Here, the lightemitted from the nanostructures ns may have different phases accordingto shapes of the nanostructures ns.

The light of the nanostructures ns may satisfy a sub-wavelengthscattering or a sub-wavelength grating condition. For example, thenanostructures ns may have a dimension element which is shorter than theresonant wavelength. The dimension element may denote a length elementof a three-dimensional (3D) shape of the nanostructure, such as aheight, a diameter, etc., of the nanostructure ns. For example, light ofan area of infrared rays or visible rays has a wavelength of hundreds ofnm, and thus, the dimension element of the nanostructure ns fortransmitting and receiving visible rays may be equal to or less thanhundreds of nm. Thus, a greatest length of the dimension elements of theplurality of nanostructures ns may be less than a wavelength of incidentlight.

Light that is incident onto and emitted from an arrangement ofnanostructures ns that satisfies the sub-wavelength scattering conditionmay have optical characteristics that vary according to a shape or avolume of the nanostructures ns, and the arrangement of thenanostructures ns. For example, the light emitted from thenanostructures ns may have optical characteristics that vary, such as awavelength, polarization, and an emission (or reflection) angle, etc.

The nanostructures ns may include a material having a higher refractiveindex than a material of the surrounding structure sr. For example, thenanostructures ns may include at least one among c-Si, a-Si, p-Si, e.g.,poly silicon, GaP, GaAs, SiC, TiO₂, SiN, and GaN. Alternatively, thenanostructures ns may include a metal. The nanostructures ns including ametal may cause a surface plasmon effect with respect to the surroundingstructure sr.

The surrounding structure sr and the transparent substrate 130 mayinclude a material having a lower refractive index than the material ofthe nanostructures ns. For example, the nanostructures ns may have a 1.5times greater refractive index than the surrounding structure sr and thetransparent substrate 130. The surrounding structure sr may include amaterial which is transparent with respect to incident light. Forexample, the surrounding structure sr may include the same material asthe transparent substrate 130. For example, the surrounding structure srmay include a glass material, SiO₂, or a polymer. The polymer mayinclude PMMA, PDMS, SU8, or the like.

The surrounding structure sr does not need to be formed as an additionalcomponent, and may be a portion of the transparent substrate 130 onwhich the plurality of nanostructures ns are arranged.

For example, the integrated spectrum optical system 110 may be formed onthe transparent substrate 130 as follows. First, a material of thenanostructures ns may be deposited or spread on the transparentsubstrate 130. Second, the material of the nanostructures ns may beshaped, by using a semiconductor process, as a specific pattern on aportion of the transparent substrate 130, on which the spectrum opticalsystem 110 is to be formed. Third, a material that is the same as thematerial of the transparent substrate 130 may be deposited or spread onthe deposited or spread material of the nanostructures ns to form thesurrounding structure sr surrounding the nanostructures ns. Thedescribed operations for forming the spectrum optical system 110 areonly an example, and an exemplary embodiment is not limited thereto.

The metasurface may have functions of various optical elements accordingto arrangements of nanostructures ns. The spectrometer 100 according tothe present exemplary embodiment may include the spectrum optical system110, which replaces optical elements of the spectrometer of the relatedart, with, for example, the focusing metasurface 111, a collimatingmetasurface 212 of FIG. 4, a grating metasurface 213 of FIG. 4, etc.

The focusing metasurface 111 may function as a focusing mirror. Thefocusing metasurface 111 may focus light incident onto the slit 140 todifferent locations based on wavelengths, and may make the focused lightbe incident onto the sensor 120 so that the light becomes spectral. Thisaspect will be described in detail with reference to FIGS. 2 and 3.

The sensor 120 may receive the light for each wavelength. The sensor 120may include a sensor for receiving light. The sensor 120 may include apixel sensor, such as a charge coupled device (CCD), a complementarymetal-oxide semiconductor (CMOS), or an InGaAs sensor, which may receivethe light one-dimensionally or two-dimensionally.

The slit 140 may adjust an amount of and an incident angle of light thatis incident onto the transparent substrate 130. For example, the slit140 may be an opening of a certain size, which is not blocked by a blocklayer 148. For example, the slit 140 may include a convex lens that mayfocus the incident light. The convex lens may include atransmittance-type metasurface lens including nanostructures ns and asurrounding structure sr. For example, a diameter of the slit 140 may bechanged to adjust an influx amount of light.

The spectrometer 100 may further include the block layer 148 to blockexternal light. The block layer 148 may be disposed on the transparentsubstrate 130 and may absorb light so that the light is not transmittedinside the transparent substrate 130 through the areas other than theslit 140. The block layer 148 may include a material reflecting orabsorbing light, such as ultraviolet rays, visible rays, and infraredrays. For example, the block layer 148 may include a metal material toreflect external light. For example, the block layer 148 may include alight absorption material, such as carbon black, to absorb light. Theblock layer 148 may block an influx of external light except the lightincident onto the slit 140, thereby improving the spectrum efficiency ofthe spectrometer 100. The block layer 148 may be provided to surroundthe transparent substrate 130 except the slit 140. For example, theblock layer 148 may be formed by coating an external surface of thetransparent substrate 130 with the metal material. That is, the blocklayer 148 may be formed by using a material for blocking external lightfrom being transmitted to the spectrometer 100, and is not limited tospecific structures or materials.

The spectrometer 100 according to the present exemplary embodimentincludes only the focusing metasurface 111 in the spectrum opticalsystem 110, and thus, the spectrometer 100 may have a simple structureand a relatively smaller size.

FIGS. 2 and 3 are views of the focusing metasurface 111 according to anexemplary embodiment.

Referring to FIG. 2, the focusing metasurface 111 may include anarrangement of the plurality of nanostructures ns functioning as thefocusing mirror. The plurality of nanostructures ns may be arranged suchthat diameters or dimensions of the cross-sections thereof graduallydecrease or increase, as the distance of the plurality of nanostructuresns from a point, e.g., a point 150, on the focusing metasurface 111increase. For example, the plurality of nanostructures ns may bearranged such that a distance l₄ from a center of one nanostructure to acenter of another nanostructure is constant, and such that duty ratiosof the nanostructures ns decrease as the distance of the nanostructuresns from a point of the focusing metasurface 111 increase. When adiameter of a nanostructure 152, which is the closest to a point 150, isf₀, and diameters of nanostructures ns, which are disposed apart fromeach other and from the nanostructure 152, are respectively f₁, f₂, andf₃, a relationship of f₀>f₁>f₂>f₃ is achieved. A group of nanostructuresns that satisfies the relationship of f₀>f₁>f₂>f₃ may be referred to asa ring-shaped area, and the focusing metasurface 111 may include atleast one ring-shaped area.

Referring to FIG. 3, the focusing metasurface 111 may include aplurality of ring-shaped areas in which diameters of cross-sections ofnanostructures ns gradually decrease, as the distance of thenanostructures ns from a certain point on the focusing metasurface 111increase. For example, the focusing metasurface 111 may include a firstring-shaped area 156 and a second ring-shaped area 158 arranged suchthat the nanostructures ns in each of the first ring-shaped area 156 andthe second ring-shaped area 158 have gradually decreasing diameters asthe nanostructures ns are located further away from a center point,e.g., a point 150 of FIG. 2, toward the outside (reference numerals 160and 162) of each of the first ring-shaped area 156 and the secondring-shaped area 158.

In the cross-sectional view B-B′ of the focusing metasurface 111, aphase of light emitted from the focusing metasurface 111 may have aphase change of 2pi, between the first ring-shaped area and the secondring-shaped area.

The focusing metasurface 111 may have adjustable diameters of thenanostructures, distances between the nanostructures ns, shapes ofsections, materials, duty ratios, and shapes of ring-shaped areas tocontrol various characteristics of light, such as a shape, an angle,chromatic dispersion, etc., of light that is focused.

FIG. 4 is a schematic cross-sectional view of a spectrometer 200according to an exemplary embodiment.

Referring to FIG. 4, the spectrometer 200 according to the presentexemplary embodiment may include a spectrum optical system 210 furtherincluding the collimating metasurface 212 disposed on the second surface144 to receive the light from the slit 140, and the grating metasurface213 disposed on the first surface 120 to receive light focused by thefocusing metasurface 111. The structure of the collimating metasurface212 and the grating metasurface 213 may be substantially similar to thatof the focusing metasurface 111 and repeated descriptions will beomitted. Components of the spectrometer 200, which are the same as thecomponents of the spectrometer 100, will not be repeatedly described.

The collimating metasurface 212 may function as a light deflector and/ora collimator. The collimating metasurface 212 may make a wavefront oflight incident through the slit 140 into a plane wave and collimate,reflect, and/or diffract the plane wave to prevent diffusion of thelight, and may polarize the collimated, reflected and diffracted planewave by a certain angle toward the grating metasurface 213.

The collimating metasurface 212 may be formed by properly mixingcharacteristics of the grating metasurface 213 and the focusingmetasurface 111. For example, when a shape (a shape of a wavefront andan intensity distribution) of the light incident through the slit 140,and a shape of the plane wave reflected from the collimating metasurface212 are predetermined, the collimating metasurface 212 of a desiredshape may be formed. In detail, based on the shape of the incident lightand the shape of the plane wave, a reflection phase distribution thatthe collimating metasurface 212 may be determined based on a location ofthe collimating metasurface 212. The reflection phase distribution maycorrespond to a section of a hologram. For example, when the wavefrontof the incident light is similar to a diverging square wave, thecollimating metasurface 212 may have the reflection phase distributionin which a phase distribution of a metasurface functioning as a concavemirror and a phase distribution of the grating metasurface 213diffracting a plane wave incident beam in a certain direction are added.

The grating metasurface 213 may function as a grating element. Thegrating metasurface 213 may reflect and/or diffract light at differentangles according to wavelengths. An arrangement of nanostructures of thegrating metasurface 213 will be described in detail with reference toFIGS. 6 through 8.

When an average length of an optical path from the slit 140 to thesensor 120 for receiving light is L, the spectrum performance of thespectrometer 200 may be improved, as L increases.

The principle, based on which the spectrum efficiency of thespectrometer 200 is improved as L increases, will be described. Themetasurface having the arrangement of nanostructures may have achromatic dispersion characteristic reflecting and diffracting light ofdifferent wavelengths by different angles. The chromatic dispersioncharacteristic of metasurface elements having different diffractionangles for each wavelength makes a greater difference of a location of afocal point of light for each wavelength in the sensor 120, as the totaloptical length increases. Thus, when light of each wavelengthtransmitted through the metasurface is incident in sufficientlydifferent locations (pixels) of the sensor 120, spectrum resolution (anincident wavelength distance/pixel size) may increase.

The spectrometer 200 according to the present exemplary embodiment mayobtain a sufficient spectrum efficiency, by making the average length Lof the optical path sufficiently great, compared to a thickness d of thetransparent substrate 130, by replacing the related art optical elementwith the thin flat-shaped metasurface. For example, the spectrometer 200may satisfy the following inequality.L/d>3  [Inequality 1]

The spectrometer 200 according to the present exemplary embodiment mayhave the arrangement and dimension elements of the spectrum opticalsystem 210 to satisfy Inequality 1. The spectrometer 200 satisfyingInequality 1 may have a high spectrum efficiency. The gratingmetasurface 213 may increase the length L of the optical path of thelight incident onto the spectrometer 200.

FIG. 5 is a perspective view of a schematic shape of a plurality ofnanostructures ns.

Referring to reference numerals 502, 504, 506, and 508 of FIG. 5, theplurality of nanostructures ns may have various shapes. The plurality ofnanostructures ns may have a pillar structure. For example, thenanostructures ns may have a cross-section of a shape of any one of acircle, an oval, a rectangle, and a square. The nanostructures nsincluded in a metasurface may have various heights and shapes ofcross-sections on a two-dimensional surface.

FIG. 6 is a view of the grating metasurface 213 according to anexemplary embodiment. FIG. 7 is a graph showing a grating efficiency ofthe grating metasurface 213 of FIG. 6.

Referring to FIG. 6, the arrangement of nanostructures ns may correspondto an arrangement of nanostructures ns of the grating metasurface 213.

When a length of a dimension element of the nanostructures ns is lessthan a resonant wavelength of each nanostructure ns, light incident ontothe nanostructure ns may be sub-wavelength grated, as described above.Thus, the arrangement of nanostructures ns of the grating metasurface213 may be such that the nanostructures ns having the same sectionalshapes and sectional areas are repeatedly arranged in a constant cycle.The cycle denotes a distance from a center of a nanostructure ns to acenter of another nanostructure adjacent to the nanostructure. The cycleis less than the resonant wavelength. A wavelength resolution effect ofthe grating metasurface 213 is not all the same for light of everywavelength range, and may be different for light of each wavelengthbased on a shape or an area of a cross-section of each nanostructure ns,and a distance between the nanostructures ns.

Referring to FIG. 6, the arrangement of nanostructures ns according tothe present exemplary embodiment may include a first-first pattern 600and a first-second pattern 602 cyclically repeated in an x axisdirection. The first-first pattern 600 and the first-second pattern 602are only an example, and other patterns may further be included in thearrangement of nanostructures ns. For convenience of explanation, anexemplary embodiment including the first-first pattern 600 and thefirst-second pattern 602 will be described.

The first-first pattern 600 may include the plurality of nanostructuresns cyclically repeated in the y axis direction. Sectional areas andshapes of the plurality of nanostructures ns included in the first-firstpattern 600 may be the same. A duty ratio of the first-first pattern 600may be constant. For example, the plurality of nanostructures ns may becyclically repeated in the y axis direction, while disposed apart by adistance l₁.

The first-second pattern 602 may include the plurality of nanostructuresns cyclically repeated in the y axis direction. Sectional areas andshapes of the plurality of nanostructures ns included in thefirst-second pattern 602 may be the same. A duty ratio of thefirst-second pattern 602 may be constant. For example, the plurality ofnanostructures ns may be cyclically repeated in the y axis direction,while disposed apart by a distance l₂. The cross-section of theplurality of nanostructures ns included in the first-first pattern 600and the cross-section of the plurality of nanostructures ns included inthe first-second pattern 602 may have the same size or different sizes.

The distances l₁ and l₂ may be the same. The duty ratios of thefirst-first pattern 600 and the first-second pattern 602 may be the sameor different. The duty ratios and heights of the nanostructures ns ofthe first-first pattern 600 and the first-second pattern 602 may beadjusted to adjust a corresponding wavelength range of a gratingpattern.

The first-first pattern 600 and the first-second pattern 602 may bearranged to be alternately repeated in the x axis direction. Thenanostructures ns of the first-first pattern 600 and the first-secondpattern 602 may be aligned or shifted with respect to each other in thex axis direction. For example, some of the nanostructures ns of thefirst-first pattern 600 and the first-second pattern 602 may be shiftedto have a hexagonal pattern. For example, the plurality ofnanostructures ns forming the hexagonal pattern may be arranged suchthat centers of the nanostructures ns forming the hexagonal pattern maybe connected to form a regular hexagon.

The arrangement of nanostructures ns having repeated hexagonal patternsin the x axis direction and the y axis direction may have a greatergrating efficiency than the arrangement of nanostructures ns havingaligned patterns.

Referring to FIG. 7, the x axis of the graph may indicate a wavelengthof light, and the y axis of the graph may indicate a grating efficiency(%). For example, the arrangement of nanostructures ns of FIG. 4 mayhave a grating efficiency that is equal to or higher than 55%, withrespect to light of wavelength ranges between 820 nm and 870 nm.

FIG. 8 is a view of a grating metasurface 213 according to an exemplaryembodiment. Referring to FIG. 8, a plan view of the grating metasurface213 and a cross-sectional view A-A′ of the grating metasurface 213 ofthe plan view are illustrated. The grating metasurface 213 may include apattern including a plurality of nanostructures ns arranged such thatsectional areas of the nanostructures ns gradually increase or decreasein the x axis direction.

The pattern may be cyclically repeated in the x axis direction and adistance between centers of each two nanostructures is a constantdistance l₃. For example, the pattern may be a pattern having sectionalareas gradually decreasing from a left side to a right side, in a +xaxis direction. For example, the pattern may include nanostructures 800,802, 803, and 804 having diameters e₀, e₁, e₂, and e₃, respectivelydecreasing in the +x axis direction, so that the diameters e₀, e₁, e₂,and e₃ may satisfy the relationship of e₀>e₁>e₂>e₃. For example, thediameters e₀, e₁, e₂, and e₃ may be designed to sample a phase of lightreflected from each nanostructure ns within the distance l₃, by the samedistance between 0 and 2pi (for example, 0, pi/2, pi, and 3pi/2). Thegrating metasurface 213 having this structure may give a momentum of2pi/l₃ in the +x direction. Incident light may be reflected anddiffracted by being polarized to the right side, in correspondence to amomentum that is given when the light is incident, to which theabove-described momentum is added.

The pattern may be cyclically repeated in the x axis direction. Thepattern may be aligned or misaligned in the y axis direction and/or inthe x axis direction. For example, the pattern may be arranged such thatnanostructures ns having the same sectional areas in the y axisdirection are cyclically repeated in an aligned fashion. For example,the pattern may be arranged such that nanostructures ns having differentsectional areas in the y axis direction are cyclically repeated in ashifted fashion to form a hexagonal pattern.

FIG. 9 is a schematic cross-sectional view of a spectrometer 300according to an exemplary embodiment. The spectrometer 300 according tothe present exemplary embodiment has substantially the same componentsas the spectrometer 200 of FIG. 4, except that the spectrometer 300includes an aberration control metasurface 314 disposed on the firstsurface 142, and thus, repeated descriptions will be omitted.

Referring to FIG. 9, light may be incident onto the transparentsubstrate 130 by passing through the slit 140, and may sequentially passthrough the collimating metasurface 212, the grating metasurface 213,the focusing metasurface 111, and the aberration control metasurface314, and be received by the sensor 120. Due to the aberration controlmetasurface 314, a length L of an optical path of the spectrometer 300may be increased. The aberration control metasurface 314 may have afunction of correcting aberration so that light of various wavelengthsfocused by the focusing metasurface 111 is incident onto each pixellocation of the sensor 120, which corresponds to each wavelength.

For example, the focusing metasurface 111 may also have a characteristicof a lens since light is incident to nanostructures ns and refracted.For example, light having passed through the focusing metasurface 111may form an image in the sensor 120 in a shifted position due tochromatic aberration, spherical aberration, and astigmatic aberration.The aberrations may decrease a spectrum efficiency of the sensor 120.The aberration control metasurface 314 may have an arrangement ofnanostructures ns to have an aberration control function. For example,the aberration control metasurface 214 may have the arrangement ofnanostructures of the focusing metasurface 111 described above, or anarrangement of nanostructures having a function of a slight convex orconcave lens.

FIG. 10 is a schematic cross-sectional view of a spectrometer 400according to an exemplary embodiment. FIG. 11 is a schematic plan viewof the spectrometer 400 of FIG. 10, seen from a direction.

Referring to FIG. 10, the spectrometer 400 according to the presentexemplary embodiment may include a collimating metasurface 411, agrating metasurface 412, a focusing metasurface 413, and a sensor 420.

The collimating metasurface 411 may be provided below a slit 440 in a zaxis direction. The grating metasurface 412 may be provided at a certaindistance from the collimating metasurface 411 in an x axis direction andthe z axis direction. The focusing metasurface 413 may be provided at acertain distance from the grating metasurface 412 in a y axis directionand the z axis direction. The sensor 420 may be provided at a certaindistance from the focusing metasurface 413 in the x axis direction andthe z axis direction. Light may be incident onto a transparent substrate430 through the slit 440, and may pass through the collimatingmetasurface 411, the grating metasurface 412, and the focusingmetasurface 413 and be received by the sensor 420.

The focusing metasurface 413 may have substantially the same focusingfunction as the focusing metasurface 111 of FIG. 1, and may have afunction of adding an optical momentum to light in a certain direction.For example, the focusing metasurface 413 may include a pattern in whichnanostructures are arranged on an x-y plane in a diagonal shape. Forexample, the grating metasurface 412 may be arranged such that thenanostructures are cyclically arranged on a line satisfying a functionof y=a₁*(−x)+a₂. Here, a₁ and a₂ may be rational numbers.

The collimating metasurface 411, the grating metasurface 412, thefocusing metasurface 413, and the sensor 420 may be three-dimensionallyarranged. The 3D arrangement of the metasurfaces may denote that a lineconnecting centers of the metasurfaces provided in the spectrometer 400has a 3D shape. The spectrometer 400 including the three-dimensionallyarranged metasurfaces may have a length of an optical path that issufficiently great, with respect to a volume of the spectrometer 400,and thus, spectrum efficiency is improved. For example, when thecollimating metasurface 411 and the grating metasurface 412 are locatedadjacent to a first side surface 448 of the transparent substrate 430,the focusing metasurface 413 and the sensor 414 may be arranged adjacentto a second side surface 450 facing the first side surface 448.

The grating metasurface 412 may have substantially the same gratingfunction as the grating metasurface 213 described above. However, incorrespondence to the metasurfaces that are three-dimensionallyarranged, the optical path also has to be three-dimensionally formed.

The grating metasurface 412 and the focusing metasurface 413 may have afunction of adding an optical momentum for shifting reflected incidentlight, for example, by 90° in a horizontal direction. The opticalmomentum is a term describing straightness of light from a perspectiveof inertia. For example, the grating metasurface 412 may include apattern in which nanostructures are cyclically arranged on an x-y planein a diagonal shape. For example, the grating metasurface 412 may bearranged such that the nanostructures are cyclically arranged on a linesatisfying a function of y=b₁*x+b₂. Here, b₁ and b₂ may be real numbers.

Referring to FIG. 11, in the spectrometer 400, seen from the z axisdirection, the collimating metasurface 411, the grating metasurface 412,the focusing metasurface 413, and the sensor 420 may betwo-dimensionally arranged. For example, the collimating metasurface411, the grating metasurface 412, the focusing metasurface 413, and thesensor 420 may be arranged in a quadrangular shape, when seen from the zaxis direction. However, it is only an exemplary embodiment, and thecollimating metasurface 411, the grating metasurface 412, the focusingmetasurface 413, and the sensor 420 may have arrangements of variousshapes, such as a circle, an oval, etc. based on a plane seen from the zaxis direction.

FIG. 12 is a schematic cross-sectional view of a spectrometer 500according to an exemplary embodiment.

Referring to FIG. 12, the spectrometer 500 according to the presentexemplary embodiment may include a split metasurface 511, a firstfocusing metasurface 512, a second focusing metasurface 513, a firstsensor 521, and a second sensor 522. For example, the split metasurface511 may be disposed on the second surface 144 and the first focusingmetasurface 512 and the second focusing metasurface 513 may be disposedon the first surface 142.

The split metasurface 511 may function as a polarization beam splitterwhile having a grating function. The split metasurface 511 may reflectlight by splitting the light into two opposite directions, as firstpolarization light 810 and second polarization light 812, based onpolarization. Also, the split metasurface 511 may split the light suchthat the light proceeds in slightly different directions based onwavelengths, for example, illustrated as rays λ1, λ2, and λ3. Detailedstructures of the split metasurface 511 will be described later withreference to FIGS. 13 and 14. After the split metasurface 511 splits thelight into the first polarization light 810 and the second polarizationlight 812, the split metasurface 511 may resolve the first polarizationlight 810 based on each wavelength to transmit the resolved firstpolarization light 810 to the first focusing metasurface 512, and mayresolve the second polarization light 812 based on each wavelength totransmit the resolved second polarization light 812 to the secondfocusing metasurface 513. For example, the first polarization light 810may be TE mode light, and the second polarization light 812 may be TMmode light, or vice versa.

The first focusing metasurface 512 and the second focusing metasurface513 have substantially the same functionality as the focusingmetasurface 111 of FIG. 1, and thus, detailed descriptions of the firstfocusing metasurface 512 and the second focusing metasurface 513 will beomitted. The first focusing metasurface 512 may focus the firstpolarization light 810 and transmit the focused first polarization light810 to the first sensor 521. The second focusing metasurface 513 mayfocus the second polarization light 812 and transmit the focused secondpolarization light 812 to the second sensor 522.

The first sensor 521 and the second sensor 522 are substantially thesame as the sensor 120 of FIG. 1, and thus, detailed descriptions of thefirst sensor 521 and the second sensor 522 will be omitted.

The spectrometer 500 may additionally resolve light elements based onpolarization, and may have a sufficiently long optical path, withrespect to a volume of the spectrometer 500, to thereby increasespectrum efficiency.

FIG. 13 is a view of a split metasurface 511 according to an exemplaryembodiment. FIG. 14 is a view of a nanostructure pattern of the splitmetasurface 511 of FIG. 13.

Referring to FIGS. 13 and 14, the split metasurface 511 may include apattern including a plurality of nanostructures arranged such thatdiameters of the plurality of nanostructures increase and then decreasein an x axis direction, and the pattern may be cyclically repeated inthe x axis direction and a y axis direction. Each of the diameters ofthe plurality of nanostructures in the x axis direction and thediameters of the plurality of nanostructures in the y axis direction mayincrease or decrease, and each of the plurality of nanostructures maycontrol light in different polarization states due to a diameterdifference. Thus, the light is reflected, diffracted, and emitted inopposite directions. For example, when the diameters or dimensions ofcross-sections of the nanostructures in the y axis direction are k₀, k₁,k₂, k₃, k₄, k₅, k₆, k₇, and k₈, the diameters or dimensions k₀ to k₅ maygradually increase, and the diameters or dimensions k₆ to k₈ maygradually decrease.

The split metasurface 511 may reflect light by splitting the light intofirst polarization light 810 and second polarization light 812 based onpolarization. For example, the first polarization light 810 may bereflected in a +x axis direction and the second polarization light 812may be reflected in a −x axis direction.

The spectrometers 100 to 500 according to an exemplary embodiment mayinclude the metasurface which may replace various optical elements, suchas a convex lens, a concave lens, a prism, a beam polarizer, etc. Themetasurface may include a plurality of nanostructures that aretwo-dimensionally arranged.

The spectrometers 100 to 500 according to an exemplary embodimentinclude the metasurface that is relatively smaller than the opticalelements, and thus, the spectrometers 100 to 500 may have reducedvolumes.

For example, the spectrometers 100 to 500 according to an exemplaryembodiment may have a length of the optical path, which is relativelygreat with respect to the volumes of the spectrometers 100 to 500, tothus have an improved spectrum performance.

The foregoing exemplary embodiments and advantages are merely exemplaryand are not to be construed as limiting. The present teaching can bereadily applied to other types of apparatuses. Also, the description ofthe exemplary embodiments is intended to be illustrative, and not tolimit the scope of the claims, and many alternatives, modifications, andvariations will be apparent to those skilled in the art.

What is claimed is:
 1. A spectrometer comprising: a transparentsubstrate comprising a first surface and a second surface that face eachother and are substantially parallel to each other; a slit provided onthe first surface and through which light is incident onto thetransparent substrate; a spectrum optical system comprising at least onemetasurface comprising a plurality of nanostructures that aretwo-dimensionally arranged and satisfy a sub-wavelength scatteringcondition, wherein the at least one metasurface comprises a focusingmetasurface which includes first nanostructures of the plurality ofnanostructures, and is configured to reflect, disperse, and focus thelight incident thereon through the slit, at different angles based onrespective wavelengths; and a sensor configured to receive the lightfrom the focusing metasurface, wherein the focusing metasurfacecomprises a center point and has a first ring-shaped area and secondring-shaped area arranged around the center point, and has a phasechange of 2 pi between the first ring-shaped area and the secondring-shaped area.
 2. The spectrometer of claim 1, further comprising ablock layer provided at the first surface of the transparent substrateand configured to block the light from being emitted onto areas of thetransparent substrate other than the slit.
 3. The spectrometer of claim1, wherein the spectrum optical system further comprises a collimatingmetasurface comprising second nanostructures of the plurality ofnanostructures, the second nanostructures being two-dimensionallyarranged to have a collimating function.
 4. The spectrometer of claim 3,wherein the collimating metasurface is located on an optical pathbetween the slit and the focusing metasurface.
 5. The spectrometer ofclaim 3, wherein the spectrum optical system further comprises a gratingmetasurface comprising third nanostructures of the plurality ofnanostructures, the third nanostructures being two-dimensionallyarranged to have a chromatic dispersion function.
 6. The spectrometer ofclaim 5, wherein the grating metasurface is located on an optical pathbetween the collimating metasurface and the focusing metasurface.
 7. Thespectrometer of claim 6, wherein the grating metasurface, thecollimating metasurface, the focusing metasurface, and the sensor aretwo-dimensionally arranged, as seen in a plan view parallel to the firstsurface and the second surface.
 8. The spectrometer of claim 7, whereinthe transparent substrate comprises a first side surface and a secondside surface respectively connecting the first surface and the secondsurface, and the collimating metasurface and the grating metasurface arearranged adjacent to the first side surface, and the focusingmetasurface and the sensor are arranged adjacent to the second sidesurface, as seen in the plan view.
 9. The spectrometer of claim 5,wherein the grating metasurface and the sensor are provided on the firstsurface, and the collimating metasurface and the focusing metasurfaceare provided on the second surface.
 10. The spectrometer of claim 1,wherein the spectrum optical system further comprises a gratingmetasurface, wherein the grating metasurface comprises a patterncomprising third nanostructures of the plurality of nanostructures, thethird nanostructures being arranged apart from each other in a seconddirection, and wherein the pattern is cyclically repeated in a firstdirection perpendicular to the second direction.
 11. The spectrometer ofclaim 1, wherein, when L is a total length of an optical path from theslit to the sensor and D is a thickness of the transparent substrate, Land D satisfy the following inequality:L/D>3.
 12. The spectrometer of claim 1, wherein the spectrum opticalsystem further comprises a surrounding structure which surrounds theplurality of nanostructures and comprises at least one among silicondioxide (SiO2), a glass, and a polymer.
 13. The spectrometer of claim12, wherein the first nanostructures include a material having a higherrefractive index than a material of the surrounding structure.
 14. Thespectrometer of claim 13, wherein the at least one metasurface has anupper surface provided adjacent to the second surface of the transparentsubstrate, and a lower surface disposed opposite to and apart from theupper surface, and the first nanostructures and the surroundingstructure are formed from the upper surface to the lower surface withinthe at least one metasurface.
 15. The spectrometer of claim 1, whereinthe transparent substrate comprises at least one among silicon dioxide(SiO2), a glass, and a polymer.
 16. The spectrometer of claim 1, whereinthe plurality of nanostructures comprise at least one among crystallinesilicon (c-Si), amorphous silicon (a-Si), poly silicon (p-Si), galliumphosphide (GaP), gallium arsenide (GaAs), silicon carbide (SiC),titanium dioxide (TiO2), silicon nitride (SiN), and gallium nitride(GaN).
 17. The spectrometer of claim 1, wherein the focusing metasurfacemakes the focused light be incident onto different locations of thesensor based on the respective wavelengths, wherein the focusingmetasurface is disposed at the first surface or the second surface ofthe transparent substrate and the sensor is disposed at the secondsurface or the first surface of the transparent substrate, respectively.